EDS can detect major and minor elements with concentrations higher than 10 wt% (major) and minor concentrations (concentrations between 1 and 10 wt%). ![]() The detection limit in EDS depends on sample surface conditions, smoother the surface the lower the detection limit. Signals produced in an SEM/EDS system includes secondary and backscattered electrons that are used in image forming for morphological analysis as well as X-rays that are used for identification and quantification of chemicals present at detectable concentrations. Simultaneous SEM and EDS analysis is advantageous in failure analysis cases where spot analysis becomes extremely crucial in arriving at a valid conclusion. Typically, SEM instrumentation is equipped with an EDS system to allow for the chemical analysis of features being observed in SEM monitor. ![]() The energy dispersive spectroscopy (EDS) technique is mostly used for qualitative analysis of materials but is capable of providing semi-quantitative results as well.
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